Product data
Single Process Module Stripper
brief introduction：

Trion manufactures a variety of plasma etch and deposition systems for the Compound Semiconductor, MEMS, Opto-Electronic and other markets. Our products feature the smallest footprint and lowest cost systems in the industry with proven production reliability.
Product details

Single Process Module Stripper

The cost of new stripping systems has escalated to unreasonable levels. Trion has solved this critical problem with two inexpensive, compact and versatile systems: The Gemini and Apollo.
By employing ICP, microwave and RF bias power as needed, difficult to remove layers of resist can be removed at low temperatures. As required by application, each system can incorporate the SST-Lightning microwave source (which is both reliable and free from typical microwave tuning problems) or ICP technology.
• 100mm - 300mm wafers
• Etch rates up to 6um/min
• High-throughput
• Low plasma damage
• Self tuning

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