APPLICATIONS
◆Jewelry Diamonds
◆ IR Optical Window
◆ High purity Electrochemical Electrode
◆Quantum Sensor/NVQuantum Devices
◆ Heat Spreader
◆ Precision Tool Head
◆ 4th Generation Semiconductors
◆ High-Gain Laser
◆ Nano Diamond
◆ Power Semiconductor
SPECIFICATIONS
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System Model
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ZW-06SA-6KW
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ZW-10MKS-10KW/15KW
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Microwave Power
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2.45GHz 6KW
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2.45GHz 10KW
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Reactor
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Aluminium Dishing Chamber with Clamshell Lid
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Aluminium Dishing Chamber with Clamshell
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Delivery Gases
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Standard 4 gases(Optional up to 6 gases)
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Standard 4 gases(Optional up to 6 gases)
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Growth Platform
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Water-cooled stainless steel,Copper baseplate
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Water-cooled stainless steel,Copper baseplate
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Substrate Deposition Platform
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Up to 2.36"/60mm Diameter Round Platform
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Up to 3.15"/80mm Diameter Round Platform
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System Vacuum Seal
(helium leak detector)
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<Sxlo¹¹Pa.m³/sec
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<Sx10¹¹Pa.m³/sec
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Vacuum Pump
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Oil Pump18m³h(50hz)(OP)
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Oil Pump18m³h(50hz)(OP)
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Work Pressure
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10-300Torr
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10-300Torr
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Thermomete
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Double Wave Infrared Thermometer
(500-1475℃)Infrared Imaging
Thermometer(OP)
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Double Wave Infrared Thermometer
(500-1475℃)Infrared Imaging
Thermometer(OP)
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Control System
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PLC Control system,Automatic MMI Interface
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PLC Control system,Automatic MMI Interface
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Observation Window
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Standard two on Side wall,one on top
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Standard two on Side Wall,one on Top
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Power
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380Vac,3Phase+5Wire
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380Vac,3Phase+5Wire
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Water pressure/flow
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Pressure≤5bar,Flow≥6L/M
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Pressure≤5bar,Flow≥9L/M
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Dimensions
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160cmx 90cmx100cm
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160cmx 90cmx100cm
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Weight
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350KG
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400KG
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Equipment Advantages
◆ More than 10,000 hours of production operation,3 years of batch
production verification,can produce white and color diamonds.
◆ The reaction is controllable,the glowing position is fixed,and the
output power is stable.
◆ Plasma far from quartz window
◆ Adopts stainless steel Platform and copper heat dissipation Base
Plate,high temperature resistance
◆ Copper Base Plate deposits are easier to clean up
◆ Water-cooled high-efficiency heat dissipation design,the
maximum heat dissipation power up to 12KW
◆ High reliability,high repeatability,high durability
◆ Highly automatic control software system
◆ The Clamshell Lid design makes it easy to clean and speed up
secondary growth
System Characteristics
◆ Stable deposition area,Molybdenum growth Plate diameter of 50-80mm
◆ Microwave power 6KW/10KW/15KW
◆ Pure quartz windows
◆ Stainless steel Platform,high temperature resistance
◆ High pressure control,Produce high density single mode plasma.
◆ High precision gas mass flowmeter,high reliability and stable pressure control system.
◆ Stable microwave source input,including Sairem,
Mugee,MKS Instrument and other power supplies
◆ Thegrowthtemperaturecanbeautomatically controlledby intelligent automatic control of motor liftingandpower pressureratio.
◆ A secure interlocking mechanism that automatically triggers and handles risks
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