APPLICATIONS
◆Jewelry Diamonds
◆ IR Optical Window
◆ High purity Electrochemical Electrode
◆Quantum Sensor/NVQuantum Devices
◆ Heat Spreader
◆ Precision Tool Head
◆ 4th Generation Semiconductors
◆ High-Gain Laser
◆ Nano Diamond
◆ Power Semiconductor
SPECIFICATIONS
System Model
ZW-06SA-6KW
ZW-10MKS-10KW/15KW
Microwave Power
2.45GHz 6KW
2.45GHz 10KW/15KW
Reactor
Aluminium Dishing Chamber with Clamshell Lid
Aluminium Dishing Chamber with Clamshell
Delivery Gases
Standard 4 gases(Optional up to 6 gases)
Growth Platform
Water-cooled stainless steel,Copper baseplate
Substrate Deposition Platform
Up to 2.36"/60mm Diameter Round Platform
Up to 3.15"/80mm Diameter Round Platform
System Vacuum Seal
(helium leak detector)
<Sxlo¹¹Pa.m³/sec
<Sx10¹¹Pa.m³/sec
Vacuum Pump
Oil Pump18m³h(50hz)(OP)
Work Pressure
10-300Torr
Thermomete
Double Wave Infrared Thermometer
(500-1475℃)Infrared Imaging
Thermometer(OP)
Control System
PLC Control system,Automatic MMI Interface
Observation Window
Standard two on Side wall,one on top
Standard two on Side Wall,one on Top
Power
380Vac,3Phase+5Wire
Water pressure/flow
Pressure≤5bar,Flow≥6L/M
Pressure≤5bar,Flow≥9L/M
Dimensions
160cmx 90cmx100cm
Weight
350KG
400KG
◆
Stable deposition area,Molybdenum growth Plate diameter of
50-80mm
◆ Stable microwave source input,including Sairem,
Microwave power 6KW/10KW/15KW
Mugee,MKS Instrument and other power supplies
Pure quartz windows
◆ Thegrowthtemperaturecanbeautomatically controlledby
Stainless steel Platform,high temperature resistance
intelligent automatic control of motor liftingandpower
High pressure control,Produce high density single mode plasma.
pressureratio.
High precision gas mass flowmeter,high reliability and stable pressure control system.
◆ A secure interlocking mechanism that automatically triggers and handles risks