Product data
BJD/FC-2000 E-beam Coater
brief introduction：

A Temescal System is a production tool,designed for maximum efficiency,high throughput precision coating.This guiding philosophy dictates many of the system of the system design decisions that run through our entire product line.Temescal classic systems represent our traditional designs that manufacturers and scientists trust,with well characterized performance,strong throughput & high uniformity.
Product details

FC-2000 and BJD-2000 are versatile evaporation systems that accept a variety of accessories to meet almost any requirement. Engineered for efficient operation and clean room compatibility, these systems combine maximum flexibility with ease of use. The FC-2000 is a fast-cycle, load-locked system that allows the source to remain under vacuum during substrate reloading.



Product Features：


  • Product Chamber Type：Bell jar
  • Cryopump water L/sec：CT-8，4000L/s
  • Pump down time：1E-06,< 15mins
  • E-gun (max pkg)：4X25cc Poptop +1 fixed pocket
  • E-gun Power Supply：6kw or 12kw
  • Ion gun(optional)：MKI filament
  • Max wafer count: Lift off：42X2"，13X100mm
  • Source to Substrate：19.5”（std），27.5”（ext）
  • Wide-angle 4” viewport
  • One fixed uniformity mask
  • Removable stainless-steel source shieldsDrop-down, swing-out source tray, accessible from either clean room or chase side of vacuum cubicle
  • Surfaces exposed to high vacuum are made of 304 SST




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